Quartz Crystal Microbalance Coated with Sol-gel-derived Thin Films as Gas Sensor for NO Detection
نویسندگان
چکیده
This paper presents the possibilities and properties of Indium tin oxide (ITO)covered quartz crystal as a NOx toxic gas-sensor. The starting sol-gel solution was prepared by mixing indium chloride dissolved in acetylacetone and tin chloride dissolved in ethanol (0-20% by weight). The ITO thin films were deposited on the gold electrodes of quartz crystal by spin-coating technique and subsequently followed a standard photolithography to pattern the derived films to ensure all sensors with the same sensing areas. All heat treatment processes were controlled below 500°C in order to avoid the piezoelectric characteristics degradation of quartz crystal (Quartz will lose its piezoelectricity at ~573°C due to the phase change from α to β). The electrical and structural properties of ITO thin films were characterized with Hall analysis system, TG/DTA, XRD, XPS, SEM and etc. The gas sensor had featured with ITO thin films of ~100nm as the receptor to sense the toxic gas NO and quartz crystal with frequency of 10MHz as the transducer to transfer the surface reactions (mass loading, etc) into the frequency shift. A homemade setup had been employed to measure the sensor response under the static mode. The experimental results had indicated that the ITO-coated QCM had a good sensitivity for NO gas, ~12Hz/100ppm within 5mins. These results prove that the ITO-covered quartz crystals are usable as a gas sensor and as an analytical device.
منابع مشابه
Synthesis of Zinc Oxide Nanostructured Thin Film by Sol- Gel Method and Evaluation of Gas Sensing Properties
Ethanol (C2H6O) sensitivity of zinc oxide (ZnO) thin film has been studied in present work. Semiconductor thin films of zinc oxide (ZnO) were deposited onto alkali-free glass substrates by the sol–gel method and dip-coating technique. The ZnO sol was synthesized by dissolving zinc acetate dehydrate in ethanol, and then adding Tetra ethanol-amine. The as-coated films were preheated at 150 ºC fo...
متن کاملA Highly Sensitive Humidity Sensor Based on Ultrahigh-Frequency Microelectromechanical Resonator Coated with Nano-Assembled Polyelectrolyte Thin Films
We developed a highly sensitive humidity sensor based on the combination of ultrahigh-frequency film bulk acoustic resonator (FBAR) and nano-assembled polyelectrolyte (PET) thin films. The water molecule absorption efficiency was optimized by forming loosely-packed PET nanostructures. Then, the humidity sensing characteristics were analyzed in terms of sensitivity, linearity, reversibility, sta...
متن کاملNO2 gas sorption studies of Ge33Se67 films using quartz crystal microbalance
< Ge33Se67 thin film and quartz crystal microbalance for NO2 gas sensing. < Physisorption of NO2 in Ge33Se67 thin films. < Reversibility of the NO2 sorption in Ge33Se67 thin films. < Pure physical effect of gas sorption revealed by Raman, XPS, AFM. < Large free volume of the thin films encountered through GAXRD. a r t i c l e i n f o
متن کاملMolecularly Imprinted Sol-Gel-Based QCM Sensor Arrays for the Detection and Recognition of Volatile Aldehydes
The detection and recognition of metabolically derived aldehydes, which have been identified as important products of oxidative stress and biomarkers of cancers; are considered as an effective approach for early cancer detection as well as health status monitoring. Quartz crystal microbalance (QCM) sensor arrays based on molecularly imprinted sol-gel (MISG) materials were developed in this work...
متن کاملPoly(3-Methylthiophene) Thin Films Deposited Electrochemically on QCMs for the Sensing of Volatile Organic Compounds
Poly(3-methylthiophene) (PMeT) thin films were electrochemically deposited on quartz crystal microbalance QCM transducers to investigate their volatile organic compound (VOC) sensing properties depending on ambient conditions. Twelve different VOCs including alcohols, ketones, chlorinated compounds, amines, and the organosphosphate dimethyl methylphosphonate (DMMP) were used as analytes. The re...
متن کامل